Patent Assignment
Reel/Frame 051582/0350
Assignment of Assignor's Interest
Recorded: 2020-01-22
Pages: 5
Assignor
KILPI, VAINO
Executed: 2020-01-16
Assignee
PICOSUN OY
TIETOTIE 3, ESPOO, 02150, FINLAND
Covered Property
(1)
Substrate Processing Apparatus and Method
Patent:
11,004,707 →
Application:
16/749,052 →