Patent Assignment
Reel/Frame 051594/0255
Assignment of Assignor's Interest
Recorded: 2020-01-23
Pages: 3
Assignor
TANAKA, HIDEAKI
Executed: 2019-11-13
Assignee
EBARA CORPORATION
11-1, HANEDA ASAHI-CHO, OTA-KU, TOKYO 144-8510, JAPAN
Covered Property
(1)
Cleaning Apparatus of Cleaning Tool, Substrate Processing Apparatus, and Cleaning Method of Cleaning Tool