Patent Assignment
Reel/Frame 051595/0364
Assignment of Assignor's Interest
Recorded: 2020-01-23
Pages: 6
Assignors
KUBO, KAZUMI
Executed: 2020-01-17
KARAKAWA, TAKAYUKI
Executed: 2020-01-17
TAKAHASHI, YUTAKA
Executed: 2020-01-17
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU,, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Film Deposition Method