Patent Assignment
Reel/Frame 051633/0600
Assignment of Assignor's Interest
Recorded: 2020-01-27
Pages: 4
Assignors
OIE, TOSHIYUKI
Executed: 2019-11-25
PUTRA, PRIANGGA PERDANA
Executed: 2019-11-26
HORITA, AKINOBU
Executed: 2019-12-03
Assignee
MITSUBISHI GAS CHEMICAL COMPANY, INC.
5-2, MARUNOUCHI 2-CHOME, CHIYODA-KU, TOKYO, 100-8324, JAPAN
Covered Property
(1)
Liquid Composition for Reducing Damage of Cobalt, Alumina, Interlayer Insulating Film and Silicon Nitride, and Washing Method Using Same