Patent Assignment
Reel/Frame 051637/0757
Assignment of Assignor's Interest
Recorded: 2020-01-28
Pages: 5
Assignor
HATAKEYAMA, JUN
Executed: 2019-12-17
Assignee
SHIN-ETSU CHEMICAL CO., LTD.
6-1, OHTEMACHI 2-CHOME, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Positive Resist Composition and Patterning Process