Patent Assignment
Reel/Frame 051684/0418
Assignment of Assignor's Interest
Recorded: 2020-01-31
Pages: 3
Assignee
ASML NETHERLANDS B.V.
P.O. BOX 324, VELDHOVEN, 5500 AH, NETHERLANDS
Covered Property
(1)
Method and Apparatus for Source Mask Optimization Configured to Increase Scanner Throughput for a Patterning Process