Patent Assignment
Reel/Frame 051717/0724
Assignment of Assignor's Interest
Recorded: 2020-02-04
Pages: 11
Assignors
ZHU, SHAN
Executed: 2020-01-22
RUSSELL, PAUL
Executed: 2019-11-11
LEE, HUCHENG
Executed: 2019-11-08
WU, KENONG
Executed: 2019-11-08
Assignee
KLA CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Detecting Defects in a Logic Region on a Wafer