Patent Assignment
Reel/Frame 051727/0958
Assignment of Assignor's Interest
Recorded: 2020-02-05
Pages: 4
Assignor
GOSHI, GENTARO
Executed: 2020-01-29
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Substrate Processing Method