Patent Assignment
Reel/Frame 051747/0632
Assignment of Assignor's Interest
Recorded: 2020-02-07
Pages: 5
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Controlling Dry Etch Process Characteristics Using Waferless Dry Clean Optical Emission Spectroscopy