Patent Assignment
Reel/Frame 051749/0686
Assignment of Assignor's Interest
Recorded: 2020-02-07
Pages: 4
Assignor
TSUYOSHI, TAKEDA
Executed: 2019-12-25
Assignee
KOKUSAI ELECTRIC CORPORATION
3-4, KANDAKAJI-CHO, CHIYODA-KU, TOKYO, 101-0045, JAPAN
Covered Property
(1)
Plasma Generation Device, Substrate Processing Apparatus, and Method of Manufacturing Semiconductor Device