Patent Assignment
Reel/Frame 051751/0817
Assignment of Assignor's Interest
Recorded: 2020-02-07
Pages: 8
Assignors
NARUSHIMA, KENSAKU
Executed: 2020-01-17
HIRAMATSU, NAGAYASU
Executed: 2020-01-21
HOTTA, TAKANOBU
Executed: 2020-01-20
MATSUMOTO, ATSUSHI
Executed: 2020-01-17
ARAKI, MASATO
Executed: 2020-01-17
YAMASAKI, HIDEAKI
Executed: 2020-01-17
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Method and Film Forming System