Patent Assignment
Reel/Frame 051753/0499
Assignment of Assignor's Interest
Recorded: 2020-02-07
Pages: 7
Assignors
KONISHI, TERUAKI
Executed: 2019-12-09
KANAGAWA, KOUZOU
Executed: 2019-12-16
KURODA, OSAMU
Executed: 2019-12-09
TANAKA, KOJI
Executed: 2019-12-09
TSURUSAKI, KOTARO
Executed: 2019-12-09
ARATAKE, HIDEMASA
Executed: 2019-12-09
OGURA, KOUJI
Executed: 2019-12-09
HIRASE, KEITA
Executed: 2019-12-09
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Processing Liquid Concentration Method