Patent Assignment
Reel/Frame 051773/0007
Assignment of Assignor's Interest
Recorded: 2020-02-10
Pages: 6
Assignee
GIGAPHOTON INC.
400, OAZA YOKOKURASHINDEN, OYAMA-SHI, TOCHIGI, 3238558, JAPAN
Covered Property
(1)
Extreme Ultraviolet Light Generation Apparatus and Extreme Ultraviolet Light Generation Apparatus Controlling Method