Patent Assignment
Reel/Frame 051825/0257
Assignment of Assignor's Interest
Recorded: 2020-02-14
Pages: 8
Assignors
LEE, TAEHYOUNG
Executed: 2019-12-09
KIM, BYEONGSANG
Executed: 2019-12-09
KIM, SUNG CHAI
Executed: 2019-12-09
KIM, WOORAM
Executed: 2019-12-10
YUN, KYUNGWON
Executed: 2019-12-10
LEE, KEONHO
Executed: 2019-12-16
IM, SANGIL
Executed: 2019-12-09
CHO, NAMYOUNG
Executed: 2019-12-18
Assignee
SAMSUNG ELECTRONICS CO., LTD.
129, SAMSUNG-RO, YEONGTONG-GU, GYEONGGI-DO, SUWON-SI, 16677, KOREA, REPUBLIC OF
Covered Property
(1)
Method of inspecting a semiconductor processing chamber using a vision sensor, and method for manufaturing a semiconductor device using the same