Patent Assignment
Reel/Frame 051855/0299
Assignment of Assignor's Interest
Recorded: 2020-02-19
Pages: 4
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Apparatus for Selectively Etching First Region Made of Silicon Nitride Against Second Region Made of Silicon Oxide