Patent Assignment
Reel/Frame 051869/0801
Assignment of Assignor's Interest
Recorded: 2020-02-20
Pages: 17
Assignors
KIM, YOUNSOO
Executed: 2019-12-31
KIM, HAERYONG
Executed: 2020-01-09
RYU, SEUNGMIN
Executed: 2019-12-31
MOON, SUNMIN
Executed: 2019-12-31
SONG, JEONGGYU
Executed: 2020-01-09
WOO, CHANGSU
Executed: 2019-12-31
JUNG, KYOOHO
Executed: 2019-12-31
CHO, YOUNJOUNG
Executed: 2019-12-31
Assignee
SAMSUNG ELECTRONICS CO., LTD.
129, SAMSUNG-RO, YEONGTONG-GU, SUWON-SI, GYEONGGI-DO, 16677, KOREA, REPUBLIC OF
Covered Property
(1)
Method of Forming Oxide Film Including Two Non-Oxygen Elements, Method of Manufacturing Semiconductor Device, Method of Forming Dielectric Film, and Semiconductor Device