Patent Assignment
Reel/Frame 051885/0549
Assignment of Assignor's Interest
Recorded: 2020-02-21
Pages: 5
Assignor
KOIWA, SHINGO
Executed: 2020-02-19
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU,, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Stage and Substrate Processing Apparatus