Patent Assignment
Reel/Frame 051902/0796
Assignment of Assignor's Interest
Recorded: 2020-02-24
Pages: 5
Assignors
TANIGUCHI, RYOSUKE
Executed: 2020-01-23
WATANABE, SATOSHI
Executed: 2020-01-28
OHASHI, MASAKI
Executed: 2020-01-27
INOUE, NAOYA
Executed: 2020-01-27
Assignee
SHIN-ETSU CHEMICAL CO., LTD.
6-1, OHTEMACHI 2-CHOME, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Resist Composition and Patterning Process