Patent Assignment
Reel/Frame 051915/0836
Assignment of Assignor's Interest
Recorded: 2020-02-25
Pages: 4
Assignors
CHANG, CHIH-CHIEH
Executed: 2020-01-09
CHEN, YEN-TING
Executed: 2020-01-09
HUANG, HUI-CHI
Executed: 2020-01-09
CHEN, KEI-WEI
Executed: 2020-01-09
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Methods to Clean Chemical Mechanical Polishing Systems