Patent Assignment
Reel/Frame 051926/0593
Assignment of Assignor's Interest
Recorded: 2020-02-25
Pages: 5
Assignors
HUANG, YU-CHIH
Executed: 2019-10-02
YANG, CHI
Executed: 2019-10-02
HSU, CHE-CHANG
Executed: 2019-10-02
CHEN, LI-JUI
Executed: 2019-10-02
CHENG, PO-CHUNG
Executed: 2019-10-14
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO.8, LI-HSIN RD. 6, SCIENCE BASED INDUSTRIAL PARK, HSINCHU, 300, TAIWAN
Covered Property
(1)
Apparatus and Method for Monitoring Reflectivity of the Collector for Extreme Ultraviolet Radiation Source