Patent Assignment
Reel/Frame 051937/0895
Assignment of Assignor's Interest
Recorded: 2020-02-26
Pages: 5
Assignor
KIMBA, TOSHIFUMI
Executed: 2020-01-14
Assignee
EBARA CORPORATION
11-1, HANEDA ASAHI-CHO, OTA-KU, TOKYO, 1448510, JAPAN
Covered Property
(1)
Polishing Method and Polishing Apparatus