Polishing method and polishing apparatus
A polishing method capable of accurately measuring a film thickness of a substrate, such as a wafer, by enhancing light intensity of a flash-light source, such as a xenon flash lamp is disclosed. The polishing method includes: while an optical sensor head is moving across a substrate, causing a flash-light source to emit light plural times in a first exposure time of a light detector to direct the light to the substrate via the optical sensor head, capturing reflected light from the substrate by the light detector via the optical sensor head, further causing the flash-light source to emit light plural times in a second exposure time of the light detector to direct the light to the substrate via the optical sensor head, and capturing reflected light from the substrate by the light detector via the optical sensor head; generating a spectrum of the reflected light; and detecting a surface state of the substrate from the spectrum.
1. A polishing method of polishing a substrate, comprising:
rotating a polishing table together with an optical sensor head optically coupled to a light detector and a flash-light source;
polishing the substrate by pressing the substrate against a polishing pad on the polishing table while moving the optical sensor head across the substrate;
while the optical sensor head is moving across the substrate, causing the flash-light source to emit a first light plural times in a first exposure time of the light detector to direct the first light to the substrate via the optical sensor head, capturing first reflected light from the substrate by the light detector via the optical sensor head, further causing the flash-light source to emit a second light plural times in a second exposure time of the light detector to direct the second light to the substrate via the optical sensor head, and capturing second reflected light from the substrate by the light detector via the optical sensor head, the second exposure time being longer than the first exposure time, a number of times the flash-light source emits the first light in the first exposure time being the same as a number of times the flash-light source emits the second light in the second exposure time;
generating spectra of the first reflected light and the second reflected light; and
detecting a surface state of the substrate from the spectra.
2. The polishing method according to claim 1 , wherein the first exposure time is an exposure time when the optical sensor head is moving across an edge portion of the substrate.
3. The polishing method according to claim 1 , wherein the second exposure time is an exposure time when the optical sensor head is moving across a central portion of the substrate.
4. The polishing method according to claim 1 , wherein time intervals of emitting the first light and time intervals of the second light are changed while the optical sensor head is moving across the substrate.
5. The polishing method according to claim 1 , wherein time intervals of emitting the second light in the second exposure time is longer than time intervals of emitting the first light in the first exposure time.
6. A polishing apparatus for polishing a substrate, comprising:
a polishing table for supporting a polishing pad;
a table motor configured to rotate the polishing table;
an optical sensor head located in the polishing table;
a flash-light source and a light detector optically coupled to the optical sensor head;
a polishing head configured to press the substrate against the polishing pad to polish the substrate; and
an operation controller configured to control operations of the flash-light source and the light detector, the operation controller being configured to,
while the optical sensor head is moving across the substrate, instruct the flash-light source to emit a first light plural times in a first exposure time of the light detector to direct the first light to the substrate via the optical sensor head, instruct the light detector to capture first reflected light from the substrate via the optical sensor head, further instruct the flash-light source to emit a second light plural times in a second exposure time of the light detector to direct the second light to the substrate via the optical sensor head, and instruct the light detector to capture second reflected light from the substrate via the optical sensor head, the second exposure time being longer than the first exposure time, a number of times the flash-light source emits the first light in the first exposure time being the same as a number of times the flash-light source emits the second light in the second exposure time,
generate spectra of the first reflected light and the second reflected light, and
detect a surface state of the substrate from the spectra.
7. The polishing apparatus according to claim 6 , wherein the first exposure time is an exposure time when the optical sensor head is moving across an edge portion of the substrate.
8. The polishing apparatus according to claim 6 , wherein the second exposure time is an exposure time when the optical sensor head is moving across a central portion of the substrate.
9. The polishing apparatus according to claim 6 , wherein time intervals of emitting the first light and time intervals of the second light are changed while the optical sensor head is moving across the substrate.
10. The polishing apparatus according to claim 6 , wherein time intervals of emitting the second light in the second exposure time is longer than time intervals of emitting the first light in the first exposure time.