Patent Assignment
Reel/Frame 051939/0751
Assignment of Assignor's Interest
Recorded: 2020-02-26
Pages: 4
Assignors
CHUANG, CHIA-LIN
Executed: 2020-02-11
CHANG, CHIA-HAO
Executed: 2020-02-11
CHUANG, CHENG-CHI
Executed: 2020-02-11
LIN, YU-MING
Executed: 2020-02-13
WANG, CHIH-HAO
Executed: 2020-02-17
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Semiconductor Device Structure Having Air Gap and Method for Forming the Same