Patent Assignment
Reel/Frame 051942/0996
Assignment of Assignor's Interest
Recorded: 2020-02-26
Pages: 4
Assignors
WANG, DAVID Y.
Executed: 2020-01-14
ZHUANG, GUORONG V.
Executed: 2020-01-17
KRISHNAN, SHANKAR
Executed: 2020-01-14
Assignee
KLA CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Mid-Infrared Spectroscopy For Measurement Of High Aspect Ratio Structures