Patent Assignment
Reel/Frame 051952/0510
Assignment of Assignor's Interest
Recorded: 2020-02-27
Pages: 5
Assignee
SAMSUNG ELECTRONICS CO., LTD.
129, SAMSUNG-RO, YEONGTONG-GU, SUWON-SI, GYEONGGI-DO, 16677, KOREA, REPUBLIC OF
Covered Property
(1)
Spin Coater and Semiconductor Fabrication Method for Reducing Regeneration of Photoresist