Patent Assignment
Reel/Frame 051953/0441
Assignment of Assignor's Interest
Recorded: 2020-02-27
Pages: 3
Assignors
CHIU, CHIH-CHIANG
Executed: 2020-02-20
LIU, DING-I
Executed: 2020-02-20
LU, YU-YING
Executed: 2020-02-20
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Equipment Module with Enhanced Protection from Airborne Contaminants, and Method of Operation