Patent Assignment
Reel/Frame 051959/0453
Assignment of Assignor's Interest
Recorded: 2020-02-28
Pages: 3
Assignors
KIYOTOMI, AKIKO
Executed: 2020-02-27
HOSAKA, MASATO
Executed: 2020-02-27
NISHIYAMA, TADASHI
Executed: 2020-02-27
HISANO, KAZUYA
Executed: 2020-02-27
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-6325, JAPAN
Covered Property
(1)
Substrate Inspection Apparatus, Substrate Processing Apparatus, Substrate Inspection Method, and Computer-Readable Recording Medium