Patent Assignment
Reel/Frame 051964/0938
Assignment of Assignor's Interest
Recorded: 2020-02-28
Pages: 3
Assignors
KUMAKURA, SHO
Executed: 2020-02-25
SASAGAWA, HIRONARI
Executed: 2020-02-25
TOMURA, MAJU
Executed: 2020-02-25
KIHARA, YOSHIHIDE
Executed: 2020-02-26
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6323, JAPAN
Covered Property
(1)
Substrate Processing Method and Substrate Processing Apparatus