Patent Assignment
Reel/Frame 051979/0811
Assignment of Assignor's Interest
Recorded: 2020-03-02
Pages: 4
Assignors
HUANG, CHEN-HUANG
Executed: 2020-01-31
SIE, MING-JHE
Executed: 2020-02-03
LIN, YIH-ANN
Executed: 2020-02-03
WEI, AN CHYI
Executed: 2020-02-03
CHEN, RYAN CHIA-JEN
Executed: 2020-02-03
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Air Spacers Around Contact Plugs and Method Forming Same