Patent Assignment
Reel/Frame 052023/0460
Assignment of Assignor's Interest
Recorded: 2020-03-05
Pages: 3
Assignors
TOYOMAKI, TOSHIAKI
Executed: 2020-02-28
KAISE, SEIICHI
Executed: 2020-03-02
NUMAKURA, MASAHIRO
Executed: 2020-03-02
TAKEYAMA, YUKI
Executed: 2020-03-02
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Container, Container Partition Plate, Substrate Processing System, and Substrate Transfer Method