Patent Assignment
Reel/Frame 052040/0082
Assignment of Assignor's Interest
Recorded: 2020-03-06
Pages: 3
Assignor
KUBOTA, SHINJI
Executed: 2020-03-03
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Processing Apparatus and Method for Generating Plasma