Patent Assignment
Reel/Frame 052060/0167
Assignment of Assignor's Interest
Recorded: 2020-03-10
Pages: 3
Assignors
SANGUINETTI, GONZALO ROBERTO
Executed: 2017-07-04
WEISS, NICOLAS MAURICIO
Executed: 2017-07-04
VAESSEN, JEAN-PIERRE AGNES HENRICUS MARIE
Executed: 2017-07-17
Assignee
ASML NETHERLANDS B.V.
P.O. BOX 324, VELDHOVEN, 5500 AH, NETHERLANDS
Covered Property
(1)
Method of Measuring a Parameter of Interest, Inspection Apparatus, Lithographic System and Device Manufacturing Method