Patent Assignment
Reel/Frame 052086/0369
Assignment of Assignor's Interest
Recorded: 2020-03-11
Pages: 2
Assignee
HITACHI HIGH-TECHNOLOGIES CORPORATION
24-14, NISHI-SHIMBASHI 1-CHOME, MINATO-KU, TOKYO, 105-8717, JAPAN
Covered Property
(1)
Semiconductor Manufacturing Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.