Patent Assignment
Reel/Frame 052098/0973
Assignment of Assignor's Interest
Recorded: 2020-03-12
Pages: 2
Assignors
ETO, SOICHIRO
Executed: 2020-02-12
MINEMURA, HIROYUKI
Executed: 2020-02-12
USUI, TATEHITO
Executed: 2020-02-12
Assignee
HITACHI HIGH-TECHNOLOGIES CORPORATION
24-14, NISHI-SHIMBASHI 1-CHOME, MINATO-KU, TOKYO, 105-8717, JAPAN
Covered Property
(1)
Etching Apparatus and Etching Method and Detecting Apparatus of Film Thickness
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.