IP Library Assignment 052098/0973
Patent Assignment
Reel/Frame 052098/0973

Assignment of Assignor's Interest

Recorded: 2020-03-12 Pages: 2
Assignors
ETO, SOICHIRO
Executed: 2020-02-12
MINEMURA, HIROYUKI
Executed: 2020-02-12
USUI, TATEHITO
Executed: 2020-02-12
Assignee
HITACHI HIGH-TECHNOLOGIES CORPORATION
24-14, NISHI-SHIMBASHI 1-CHOME, MINATO-KU, TOKYO, 105-8717, JAPAN
Covered Property (1)
Etching Apparatus and Etching Method and Detecting Apparatus of Film Thickness
Application: 16/646,790 →
Publication: US 2021/0225674
Related Assignments (1)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest Nov 18, 2020
From: HITACHI HIGH-TECHNOLOGIES CORPORATION
To: HITACHI HIGH-TECH CORPORATION
Reel/Frame 054401/0808 →