Patent Assignment
Reel/Frame 052101/0609
Assignment of Assignor's Interest
Recorded: 2020-03-12
Pages: 5
Assignors
TSAI, YU-HAO
Executed: 2020-02-19
ZHANG, DU
Executed: 2020-02-19
WANG, MINGMEI
Executed: 2020-02-19
MOSDEN, AELAN
Executed: 2020-02-19
FLAUGH, MATTHEW
Executed: 2020-02-19
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Atomic Layer Etch (Ale) of Tungsten or Other Metal Layers