Patent Assignment
Reel/Frame 052126/0021
Assignment of Assignor's Interest
Recorded: 2020-03-16
Pages: 5
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Method for Forming Insulating Film, Apparatus for Processing Substrate, and System for Processing Substrate