Patent Assignment
Reel/Frame 052140/0138
Assignment of Assignor's Interest
Recorded: 2020-03-17
Pages: 4
Assignors
HURD, TRACE
Executed: 2020-03-11
ROTONDARO, ANTONIO LUIS PACHECO
Executed: 2020-03-11
BASSETT, DEREK WILLIAM
Executed: 2020-03-11
KOSUGI, HITOSHI
Executed: 2020-03-13
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
System and Methods for Wafer Drying