Patent Assignment
Reel/Frame 052141/0529
Assignment of Assignor's Interest
Recorded: 2020-03-17
Pages: 8
Assignors
OKAZAKI, TADASHI
Executed: 2020-02-10
ABIKO, HAJIME
Executed: 2020-02-10
MIYADA, TOMOYUKI
Executed: 2020-02-12
KAGA, YUKINAO
Executed: 2020-02-10
Assignee
KOKUSAI ELECTRIC CORPORATION
3-4, KANDAKAJI-CHO, CHIYODA-KU, TOKYO, 101-0045, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Recording Medium