Patent Assignment
Reel/Frame 052208/0827
Assignment of Assignor's Interest
Recorded: 2020-03-24
Pages: 5
Assignors
HOSHI, TAKAYUKI
Executed: 2020-01-22
HONDA, MASANOBU
Executed: 2020-01-22
TABATA, MASAHIRO
Executed: 2020-01-26
HISAMATSU, TORU
Executed: 2020-01-08
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Film Etching Method for Etching Film