Patent Assignment
Reel/Frame 052219/0242
Assignment of Assignor's Interest
Recorded: 2020-03-25
Pages: 4
Assignor
GREGOR, MARIUSCH
Executed: 2018-09-19
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Systems and Methods for Pulse Width Modulated Dose Control