Patent Assignment
Reel/Frame 052234/0827
Assignment of Assignor's Interest
Recorded: 2020-03-26
Pages: 6
Assignors
SHIH, CHIH-TSUNG
Executed: 2019-11-19
LIU, BO-TSUN
Executed: 2019-11-19
FU, CHI-HUA
Executed: 2019-11-25
CHENG, KUOTANG
Executed: 2019-11-26
FU, SHIH-CHI
Executed: 2019-11-27
CHIEN, TSUNG-CHIH
Executed: 2019-11-20
LEE, TSUNG CHUAN
Executed: 2019-11-25
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN RD. 6, SCIENCE BASED INDUSTRIAL PARK, HSINCHU, 300, TAIWAN
Covered Property
(1)
Extreme Ultraviolet Mask and Method of Manufacturing the Same