Patent Assignment
Reel/Frame 052241/0372
Assignment of Assignor's Interest
Recorded: 2020-03-27
Pages: 3
Assignee
NUFLARE TECHNOLOGY, INC.
8-1, SHINSUGITA-CHO, ISOGO-KU, YOKOHAMA-SHI, KANAGAWA, 235-8522, JAPAN
Covered Property
(1)
Charged Particle Beam Writing Method and Charged Particle Beam Writing Apparatus