Patent Assignment
Reel/Frame 052247/0625
Assignment of Assignor's Interest
Recorded: 2020-03-27
Pages: 3
Assignor
BLANQUART, TIMOTHEE JULIEN VINCENT
Executed: 2018-07-03
Assignee
ASM IP HOLDING B.V.
VERSTERKERSTRAAT 8, ALMERE, 1322 AP, NETHERLANDS
Covered Property
(1)
Method for Depositing Silicon-Free Carbon-Containing Film as Gap-Fill Layer by Pulse Plasma-Assisted Deposition