Patent Assignment
Reel/Frame 052265/0525
Assignment of Assignor's Interest
Recorded: 2020-03-30
Pages: 5
Assignors
BLANQUART, TIMOTHEE JULIEN VINCENT
Executed: 2019-07-03
UTSUNO, MITSUYA
Executed: 2019-07-03
SUSA, YOSHIO
Executed: 2019-07-03
FUKAZAWA, ATSUKI
Executed: 2019-07-03
NAKANISHI, TOSHIO
Executed: 2019-07-03
Assignee
ASM IP HOLDING B.V.
VERSTERKERSTRAAT 8, ALMERE, 1322 AP, NETHERLANDS
Covered Property
(1)
Method for Depositing Silicon-Free Carbon-Containing Film as Gap-Fill Layer by Pulse Plasma-Assisted Deposition