Patent Assignment
Reel/Frame 052276/0676
Assignment of Assignor's Interest
Recorded: 2020-03-31
Pages: 3
Assignors
FRANKLIN, TIMOTHY JOSEPH
Executed: 2017-01-25
BABAYAN, STEVEN E.
Executed: 2017-01-30
KRAUS, PHILIP ALLAN
Executed: 2017-01-25
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Thermal Repeatability and in-Situ Showerhead Temperature Monitoring