Patent Assignment
Reel/Frame 052295/0900
Assignment of Assignor's Interest
Recorded: 2020-04-02
Pages: 3
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Semiconductor Processing Flow Field Control Apparatus and Method