Patent Assignment
Reel/Frame 052300/0311
Assignment of Assignor's Interest
Recorded: 2020-04-02
Pages: 3
Assignee
KOREA RESEARCH INSTITUTE OF STANDARD AND SCIENCE
267, GAJEONG-RO, YUSEONG-GU, DAEJEON, 34113, KOREA, REPUBLIC OF
Covered Property
(1)
Apparatus and Method for Measuring the Thickness and Refractive Index of Multilayer Thin Films Using Angle-Resolved Spectral Interference Image According to Polarization