Patent Assignment
Reel/Frame 052301/0334
Assignment of Assignor's Interest
Recorded: 2020-04-02
Pages: 4
Assignors
CHANG, YU-CHENG
Executed: 2020-03-17
PAN, KENG-HUI
Executed: 2020-03-17
HUANG, CHIEH-JAN
Executed: 2020-03-19
LEE, MING-LEE
Executed: 2020-03-19
CHEN, CHIANG-JEH
Executed: 2020-03-19
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO.8, LI-HSIN RD.6, SCIENCE-BASED INDUSTRIAL PARK, HSINCHU, 300, TAIWAN
Covered Property
(1)
Chemical Liquid Supplying System and Method of Supplying Chemical Liquid