Patent Assignment
Reel/Frame 052303/0987
Assignment of Assignor's Interest
Recorded: 2020-04-03
Pages: 4
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN RD. 6, SCIENCE BASED INDUSTRIAL PARK, HSINCHU, 300, TAIWAN
Covered Property
(1)
Method and Apparatus for Diffraction-Based Overlay Measurement
Patent:
10,990,023 →
Application:
16/803,981 →