Patent Assignment
Reel/Frame 052316/0031
Assignment of Assignor's Interest
Recorded: 2020-04-06
Pages: 3
Assignors
SAVANDAIAH, KIRANKUMAR NEELASANDRA
Executed: 2019-12-11
JOHNSON, WILLIAM R.
Executed: 2019-12-12
GUNTHER, DAVID
Executed: 2020-03-27
PRABHU, PRASHANT PRABHAKAR
Executed: 2020-04-01
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Methods and Apparatus for in-Situ Cleaning of Electrostatic Chucks